A Straightness Error Compensation System for Topography Measurement Based on Thin Film Interferometry
Straightness error compensation is a critical process for high-accuracy topography measurement. In this paper, a straightness measurement system was presented based on the principle of fringe interferometry. This system consisted of a moving optical flat and a stationary prism placed close to each o...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2021-04-01
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| Series: | Photonics |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2304-6732/8/5/149 |