A Straightness Error Compensation System for Topography Measurement Based on Thin Film Interferometry
Straightness error compensation is a critical process for high-accuracy topography measurement. In this paper, a straightness measurement system was presented based on the principle of fringe interferometry. This system consisted of a moving optical flat and a stationary prism placed close to each o...
Main Authors: | Hang Su, Ruifang Ye, Fang Cheng, Changcai Cui, Qing Yu |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2021-04-01
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Series: | Photonics |
Subjects: | |
Online Access: | https://www.mdpi.com/2304-6732/8/5/149 |
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