Development of microfabricated TiO2 channel waveguides
An optical channel waveguide is a key solution to overcome signal propagation delay. For the benefits of miniaturization, development of microfabrication process for waveguides is demanded. TiO2 is one of the suitable candidates for the microfabricated waveguide because of the high refractive index...
| Main Authors: | , , , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2011-09-01
|
| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/1.3615716 |