Enhancement of piezoelectric properties of lithium niobate thin films by different annealing parameters

Piezoelectric materials with useful properties find a wide range of applications including opto- and acousto- electronics. Lithium niobate in the form of a thin film is one of those promising materials and has a potential to improve ferroelectric random access memories devices, optic...

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Bibliographic Details
Main Authors: Roman N. Zhukov, K.S. Kushnerev, Dmitry A. Kiselev, Tatiana S. Ilina, Ilya V. Kubasov, Alexander M. Kislyuk, Mikhail D. Malinkovich, Yuri N. Parkhomenko
Format: Article
Language:English
Published: Pensoft Publishers 2020-06-01
Series:Modern Electronic Materials
Online Access:https://moem.pensoft.net/article/54295/download/pdf/