Enhancement of piezoelectric properties of lithium niobate thin films by different annealing parameters
Piezoelectric materials with useful properties find a wide range of applications including opto- and acousto- electronics. Lithium niobate in the form of a thin film is one of those promising materials and has a potential to improve ferroelectric random access memories devices, optic...
Main Authors: | Roman N. Zhukov, K.S. Kushnerev, Dmitry A. Kiselev, Tatiana S. Ilina, Ilya V. Kubasov, Alexander M. Kislyuk, Mikhail D. Malinkovich, Yuri N. Parkhomenko |
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Format: | Article |
Language: | English |
Published: |
Pensoft Publishers
2020-06-01
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Series: | Modern Electronic Materials |
Online Access: | https://moem.pensoft.net/article/54295/download/pdf/ |
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