DISCHARGE CHARACTERISTICS OF THE MAGNETRON SYSTEM FOR SPUTTERING, DEPOSITION, AND NANOTECHNOLOGY APPLICATIONS
Magnetron sputtering is known for years as a powerful tool for coating deposition of cutting tools and machine parts. However the experimental measurements of the magnetron discharge parameters are still necessary to provide a consumer of the magnetron system with the reliable characteristics. A vol...
| Main Authors: | , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
National Aerospace University «Kharkiv Aviation Institute»
2020-11-01
|
| Series: | Авіаційно-космічна техніка та технологія |
| Subjects: | |
| Online Access: | http://nti.khai.edu/ojs/index.php/aktt/article/view/1285 |