Design of Reconfigurable Planar Micro-Positioning Stages Based on Function Modules

Design of Reconfigurable Planar Micro-Positioning Stages Based on Function Modules

Micro-positioning stages, which are capable to meet the emerging industrial trend for performing various kinds of micro-manipulation and micro-assembly tasks are the crucial tools to miniaturize the products under ultra-high precision. The current main practice is to specifically tailor a monolithic...

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Bibliographic Details
Main Authors: Bingxiao Ding, Zhi-Xin Yang, Xiao Xiao, Geng Zhang
Format: Article
Language:English
Published: IEEE 2019-01-01
Series:IEEE Access
Subjects:
Reconfigurable micro-positioning stage
function modules
modular
low cost
Online Access:https://ieeexplore.ieee.org/document/8630949/

Internet

https://ieeexplore.ieee.org/document/8630949/

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