Simulation of the Processing Process in a Glow Discharge Plasma Generator
A theory has been developed that explains the structure formation in a thin surface layer of a material after low-energy exposure to a glow discharge plasma. This makes it possible to design new methods, technologies and automated devices for the development of an automated technological environment...
| Main Authors: | , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
EDP Sciences
2021-01-01
|
| Series: | EPJ Web of Conferences |
| Subjects: | |
| Online Access: | https://www.epj-conferences.org/articles/epjconf/pdf/2021/02/epjconf_mnps2021_01006.pdf |