Design and Analysis of a New High Precision Decoupled XY Compact Parallel Micromanipulator

Design and Analysis of a New High Precision Decoupled XY Compact Parallel Micromanipulator

With the development of nanotechnology that contains automatic control, precision machinery and precise measurement, etc., micro/nano manipulation has become a new research direction in recent years. This paper presents the design and analysis procedures of a new high precision XY decoupled compact...

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Bibliographic Details
Main Authors: Xigang Chen, Yangmin Li
Format: Article
Language:English
Published: MDPI AG 2017-03-01
Series:Micromachines
Subjects:
high precision
two-stage amplifier
decouple
kinematic analysis
flexure mechanism design
micro/nano parallel robots
finite-element analysis (FEA) simulation
Online Access:http://www.mdpi.com/2072-666X/8/3/82

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http://www.mdpi.com/2072-666X/8/3/82

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