Design, Modeling, and Testing of a Novel XY Piezo-Actuated Compliant Micro-Positioning Stage
A novel decoupled XY compliant micro-positioning stage, based on a bridge-type amplification mechanism and parallelogram mechanisms, is designed in this paper. Analytical models of the bridge-type amplification mechanism and parallelogram mechanisms are developed by Castigliano’s second theorem and...
| Main Authors: | , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2019-08-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/10/9/581 |