Novel analysis of a micropillar coupled acoustic wave sensor
Acoustic wave sensors are being developed for many emerging applications such as in semiconductor fabrication, biological diagnostics and polymer characterization. Traditional acoustic wave sensing devices such as quartz crystal microbalance (QCM) rely on polymer thin films coated on quartz plates t...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2021-11-01
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| Series: | Sensors and Actuators Reports |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2666053921000102 |