Effects of aspect ratio on the mode couplings of thin-film bulk acoustic wave resonators
We studied mode couplings in thin film bulk acoustic wave resonators of a piezoelectric film on a dielectric layer operating with the fundamental thickness-extensional mode. A system of plate equations derived in our previous paper was used which includes the couplings to the unwanted in-plane exten...
Main Authors: | , , |
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Format: | Article |
Language: | English |
Published: |
AIP Publishing LLC
2017-05-01
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Series: | AIP Advances |
Online Access: | http://dx.doi.org/10.1063/1.4983890 |