Expeditious and eco-friendly solution-free self-patterning of sol–gel oxide semiconductor thin films
Due to its simplicity and low-cost manufacturing, self-patterning has been considered a promising candidate to replace conventional photolithography. However, most solution-based self-patterning methods require toxic materials, lengthy processes and generate extensive material waste, thus hindering...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2020-09-01
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| Series: | Materials & Design |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S0264127520304834 |