Design, Manufacture and Testing of Capacitive Pressure Sensors for Low-Pressure Measurement Ranges

Design, Manufacture and Testing of Capacitive Pressure Sensors for Low-Pressure Measurement Ranges

This article presents the design, manufacture and testing of a capacitive pressure sensor with a high, tunable performance to low compressive loads (<10 kPa) and a resolution of less than 0.5 kPa. Such a performance is required for the monitoring of treatment efficacy delivered by compression...

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Bibliographic Details
Main Authors: Vasileios Mitrakos, Lisa Macintyre, Fiona C. Denison, Philip J.W. Hands, Marc P.Y. Desmulliez
Format: Article
Language:English
Published: MDPI AG 2017-02-01
Series:Micromachines
Subjects:
pressure sensor
capacitive sensing
polydimethylsiloxane (PDMS)
tunable sensitivity.
Online Access:http://www.mdpi.com/2072-666X/8/2/41

Internet

http://www.mdpi.com/2072-666X/8/2/41

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