Investigation of Pull-in Phenomenon on a Extensible Micro Beam Subjected to Electrostatic Pressure
An improved electromechanical model of an extensible micro beams was introduced, in which the effects of intrinsic residual stress from fabrication processes, fringing field and axial stress due to stretching of the extensible fixed-fixed beam were taken into account. When the maximum deflection is...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IFSA Publishing, S.L.
2007-05-01
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| Series: | Sensors & Transducers |
| Subjects: | |
| Online Access: | http://www.sensorsportal.com/HTML/DIGEST/may_07/P_144.pdf |