Volumetric Imaging and Characterization of Focusing Waveguide Grating Couplers

Volumetric Imaging and Characterization of Focusing Waveguide Grating Couplers

Volumetric imaging of focusing waveguide grating coupler emission with high spatial resolution in the visible (λ = 637.3 nm) is demonstrated using a scanning near-field optical microscope with long z-axis travel range. Stacks of 2-D images recorded at fixed distance from the device are co...

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Bibliographic Details
Main Authors: Aaron Michael Katzenmeyer, Hayden J. McGuinness, Andrew Starbuck, Dana Hood, Andy Pomerene, Erica Douglas, Emil Enache-Pommer, Christopher T. DeRose
Format: Article
Language:English
Published: IEEE 2017-01-01
Series:IEEE Photonics Journal
Subjects:
Diffractive optics
silicon nanophotonics
three dimensional microscopy.
Online Access:https://ieeexplore.ieee.org/document/8017376/

Internet

https://ieeexplore.ieee.org/document/8017376/

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