Spin-Coater Machine Control Via Passivity With Sliding Modes
In this paper, a novel control scheme for a spin-coater machine is presented, based on Passivity and Sliding Modes. The machine is used to make semiconductor thin films with a centrifugation force. A brushless direct current motor was selected as an actuator, its mathematical model is presented, inc...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2020-01-01
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| Series: | IEEE Access |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/8954717/ |