Studi Spektroskopi Electron Spin Resonance (Esr) Lapisan Tipis Amorf Silikon Karbon (A-Sic:H) Hasil Deposisi Metode Dc Sputtering

Studi Spektroskopi Electron Spin Resonance (Esr) Lapisan Tipis Amorf Silikon Karbon (A-Sic:H) Hasil Deposisi Metode Dc Sputtering

The dangling bond defect density in sputtered amorphous silicon carbon alloys have been studied by electron spin resonance (ESR). The results show that the spin density decreased slightly with increasing methane fl ow rate (CH4). The infl uence of carbon and hydrogen incorporation on g-value reveale...

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Bibliographic Details
Main Author: Rosari Saleh
Format: Article
Language:English
Published: Universitas Indonesia 2002-04-01
Series:Makara Seri Sains
Subjects:
Electron spin resonance
silicon carbon
defect density
sputtering
Online Access:http://journal.ui.ac.id/science/article/view/100/96

Internet

http://journal.ui.ac.id/science/article/view/100/96

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