Research on modelling of piezoelectric micro-positioning stage based on PI hysteresis model
Piezopositioning stage is widely used in the field of precision positioning. However, the positioning accuracy of the stage is primarily affected by the hysteresis property and dynamic property. In order to obtain high positioning precision, a mathematical model of the micro-displacement stage needs...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Wiley
2018-12-01
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| Series: | The Journal of Engineering |
| Subjects: | |
| Online Access: | https://digital-library.theiet.org/content/journals/10.1049/joe.2018.8978 |