Localization and Imaging of Integrated Circuit Defect Using Simple Optical Feedback Detection
High-contrast microscopy of semiconductor and metal edifices in integrated circuits is demonstrated by combining laser-scanning confocal reflectance microscopy, one-photon optical-beam-induced current (1P-OBIC) imaging, and optical feedback detection via a commercially available semiconductor laser...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
University of the Philippines
2004-12-01
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| Series: | Science Diliman |
| Subjects: | |
| Online Access: | http://journals.upd.edu.ph/index.php/sciencediliman/article/view/104 |