Transverse Beam Profile Analysis of a Plasma Sputter Ion Source
The beam profile of an existing plasma-sputter-type negative ion source with a titanium target is analyzed. The transverse characteristics of the ion beam are investigated and the deposition capability of the system is characterized. The ambient plasma parameters are derived via a Langmuir probe ind...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
University of the Philippines
1998-06-01
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| Series: | Science Diliman |
| Subjects: | |
| Online Access: | http://journals.upd.edu.ph/index.php/sciencediliman/article/view/258 |