Noncyclic scheduling of dual-armed cluster tools for minimization of wafer residency time and makespan
Cluster tools are used for semiconductor wafer fabrication. A cluster tool consists of several loadlock modules, processing modules, and material handling armed robots to transfer wafers between loadlocks and processing modules. Most conventional scheduling methods consider a cyclic schedule to mini...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
SAGE Publishing
2017-04-01
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| Series: | Advances in Mechanical Engineering |
| Online Access: | https://doi.org/10.1177/1687814017693217 |