Optimization in the Design and Fabrication of a PZT Piezoelectric Micromachined Ultrasound Transducer (PMUT)
This paper presents an optimized way of lead zirconate titanate (PZT) deposition in order<br />to selectively grow three different (100/001), (110), and (111) crystal orientation in two different<br />thickness ranges, thinner and thicker than 400 nm. The thickness of the PZT layer is al...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2018-11-01
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| Series: | Proceedings |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2504-3900/2/13/743 |