Ellipsometry as an express method for determining the pore parameters of ion-track SiO2 templates on a silicon substrate
Due to the effective development of ion-track technology, it became possible to produce porous templates with large areas, which are of interest for mass production of nanostructures. Given that the template parameters often define properties of the resulting nanostructures and nanosystems, a reliab...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
EDP Sciences
2019-01-01
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| Series: | EPJ Web of Conferences |
| Online Access: | https://www.epj-conferences.org/articles/epjconf/pdf/2019/06/epjconf_ayss18_01001.pdf |