The mercury microprobe for investigation of local electrophysical properties of semiconductor structures

The mercury microprobe for investigation of local electrophysical properties of semiconductor structures

The construction of mercury microprobe has been proposed for measurement of electrophysical characteristics of semiconductor materials and IS(MIS) structures with 5—25 micron locality. Local electrophysical properties of technological Si–SiO2 structures with thin oxides in the region of electrically...

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Bibliographic Details
Main Authors: Popov V. M., Klimenko A. S., Pokanevich A. P., Shustov Y. M.
Format: Article
Language:English
Published: Politehperiodika 2010-02-01
Series:Tekhnologiya i Konstruirovanie v Elektronnoi Apparature
Subjects:
MIS structure
mercury probe
electrically active defects
capacity-voltage characteristic
mechanical stresses
Online Access:http://www.tkea.com.ua/tkea/2010/1_2010/pdf/10.zip

Internet

http://www.tkea.com.ua/tkea/2010/1_2010/pdf/10.zip

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