Influence of squeeze-film damping on the dynamic behavior of a curved micro-beam
A fixed–fixed curved micro-beam resonator under the influence of harmonic electrostatic field is considered. Due to the presence of incompressible fluid between the micro-beams and the electrode, a squeeze-film damping affects the dynamic behavior of the resonator. The combined effect of curved geom...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
SAGE Publishing
2016-05-01
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| Series: | Advances in Mechanical Engineering |
| Online Access: | https://doi.org/10.1177/1687814016650120 |