A Universal High-Sensitivity Area-Variation Capacitive Displacement Transducer (CDT) Based on Fringe Effect

A Universal High-Sensitivity Area-Variation Capacitive Displacement Transducer (CDT) Based on Fringe Effect

Capacitive displacement transducers (CDTs) have been widely used in many physical sensors, attributing to high-resolution, simple electricity and easy manufacturing process. Gap-variation CDTs generally have higher displacement resolution due to small electrode gaps but suffer from the pull-in effec...

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Bibliographic Details
Main Authors: Qiu Wang, Shitao Yan, Qiangwei Xu, Shaolin Zhang, Xiaoxiao Song, Chun Zhao, Fangjing Hu, Huafeng Liu, Liangcheng Tu
Format: Article
Language:English
Published: IEEE 2019-01-01
Series:IEEE Access
Subjects:
Capacitive sensor
displacement transducer
fringe effect
MEMS
accelerometer
Online Access:https://ieeexplore.ieee.org/document/8873587/

Internet

https://ieeexplore.ieee.org/document/8873587/

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