Lightweight Thermal Compensation Technique for MEMS Capacitive Accelerometer Oriented to Quasi-Static Measurements
The application of MEMS capacitive accelerometers isimited by its thermal dependence, and each accelerometer must be individually calibrated to improve its performance. In this work, aight calibration method based on theoretical studies is proposed to obtain two characteristic parameters of the sens...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2021-04-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1424-8220/21/9/3117 |