Solid phase recrystallization induced by multi-pulse nanosecond laser annealing
The solid phase recrystallization of partially amorphized SOI structures using a pulsed Ultra-Violet Nanosecond Laser Annealing (UV-NLA) is reported. It is shown that combining UV-NLA process with a heating chuck at low temperature (450 °C) results in the perfect recrystallization of the amorphized...
| Main Authors: | , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2021-03-01
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| Series: | Applied Surface Science Advances |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2666523920300386 |