A nonlinear global model of single frequency capacitively coupled plasma and its experimental validation
The behavior of a single frequency capacitively coupled plasma (CCP) driven by 13.56 MHz rf source is investigated using an approach that integrates a nonlinear global analytical model and experimental data. The non linear model consists of a description of the plasma bulk, based on a fluid dynamics...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2018-04-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/1.5022654 |