A nonlinear global model of single frequency capacitively coupled plasma and its experimental validation
The behavior of a single frequency capacitively coupled plasma (CCP) driven by 13.56 MHz rf source is investigated using an approach that integrates a nonlinear global analytical model and experimental data. The non linear model consists of a description of the plasma bulk, based on a fluid dynamics...
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doaj-e62c2d0188b04d72b9445d13c1d6fdb42020-11-25T00:27:32ZengAIP Publishing LLCAIP Advances2158-32262018-04-0184045113045113-1110.1063/1.5022654026804ADVA nonlinear global model of single frequency capacitively coupled plasma and its experimental validationP. Saikia0H. Bhuyan1M. Escalona2M. Favre3R. S. Rawat4E. Wyndham5Institute of Physics, Pontificia Universidad Católica de Chile, Av. Vicuña Mackenna 4860, Santiago, ChileInstitute of Physics, Pontificia Universidad Católica de Chile, Av. Vicuña Mackenna 4860, Santiago, ChileInstitute of Physics, Pontificia Universidad Católica de Chile, Av. Vicuña Mackenna 4860, Santiago, ChileInstitute of Physics, Pontificia Universidad Católica de Chile, Av. Vicuña Mackenna 4860, Santiago, ChileNational Institute of Education, Nanyang Technological University, SingaporeInstitute of Physics, Pontificia Universidad Católica de Chile, Av. Vicuña Mackenna 4860, Santiago, ChileThe behavior of a single frequency capacitively coupled plasma (CCP) driven by 13.56 MHz rf source is investigated using an approach that integrates a nonlinear global analytical model and experimental data. The non linear model consists of a description of the plasma bulk, based on a fluid dynamics approach coupled to a separate model of the sheath. The parameters used in the model are obtained by operating the single frequency CCP experiment (13.56 MHz) in argon at working pressures 73 to 400m torr. Experimentally measured plasma parameters such as the electron density, electron temperature, the discharge symmetry parameter as well as the rf voltage waveforms are the inputs of the theoretical model. Model results of the DC self bias and rf current for various operating pressures and powers are shown. A comparison of the outputs of the numerical results is done with the experimentally obtained values of the DC self bias and rf current. A good quantitative correspondence between them is obtained. The results presents may substantially improve the understanding of the behavior of the capacitively coupled plasma.http://dx.doi.org/10.1063/1.5022654 |
collection |
DOAJ |
language |
English |
format |
Article |
sources |
DOAJ |
author |
P. Saikia H. Bhuyan M. Escalona M. Favre R. S. Rawat E. Wyndham |
spellingShingle |
P. Saikia H. Bhuyan M. Escalona M. Favre R. S. Rawat E. Wyndham A nonlinear global model of single frequency capacitively coupled plasma and its experimental validation AIP Advances |
author_facet |
P. Saikia H. Bhuyan M. Escalona M. Favre R. S. Rawat E. Wyndham |
author_sort |
P. Saikia |
title |
A nonlinear global model of single frequency capacitively coupled plasma and its experimental validation |
title_short |
A nonlinear global model of single frequency capacitively coupled plasma and its experimental validation |
title_full |
A nonlinear global model of single frequency capacitively coupled plasma and its experimental validation |
title_fullStr |
A nonlinear global model of single frequency capacitively coupled plasma and its experimental validation |
title_full_unstemmed |
A nonlinear global model of single frequency capacitively coupled plasma and its experimental validation |
title_sort |
nonlinear global model of single frequency capacitively coupled plasma and its experimental validation |
publisher |
AIP Publishing LLC |
series |
AIP Advances |
issn |
2158-3226 |
publishDate |
2018-04-01 |
description |
The behavior of a single frequency capacitively coupled plasma (CCP) driven by 13.56 MHz rf source is investigated using an approach that integrates a nonlinear global analytical model and experimental data. The non linear model consists of a description of the plasma bulk, based on a fluid dynamics approach coupled to a separate model of the sheath. The parameters used in the model are obtained by operating the single frequency CCP experiment (13.56 MHz) in argon at working pressures 73 to 400m torr. Experimentally measured plasma parameters such as the electron density, electron temperature, the discharge symmetry parameter as well as the rf voltage waveforms are the inputs of the theoretical model. Model results of the DC self bias and rf current for various operating pressures and powers are shown. A comparison of the outputs of the numerical results is done with the experimentally obtained values of the DC self bias and rf current. A good quantitative correspondence between them is obtained. The results presents may substantially improve the understanding of the behavior of the capacitively coupled plasma. |
url |
http://dx.doi.org/10.1063/1.5022654 |
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