Design of Composite Disturbance Observer and Continuous Terminal Sliding Mode Control for Piezoelectric Nanopositioning Stage
The nonlinearities of piezoelectric actuators and external disturbances of the piezoelectric nanopositioning stage impose great, undesirable influences on the positioning accuracy of nanopositioning stage systems. This paper considers nonlinearities and external disturbances as a lumped disturbance...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2021-09-01
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| Series: | Electronics |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2079-9292/10/18/2242 |