Correction of Scanning Steps to Improve Accuracy in Interferometric Profilometer
In scanning interferometry of longitudinal shift, an uncertainty of required phase shift performance leads to a measurement error. Such uncertainty can be caused by external factors (vibrations, air turbulence in measuring area etc.) as well as inaccuracy of the scanning system. The method for calcu...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Sciendo
2015-02-01
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| Series: | Measurement Science Review |
| Subjects: | |
| Online Access: | http://www.degruyter.com/view/j/msr.2015.15.issue-1/msr-2015-0002/msr-2015-0002.xml?format=INT |