Correction of Scanning Steps to Improve Accuracy in Interferometric Profilometer

Correction of Scanning Steps to Improve Accuracy in Interferometric Profilometer

In scanning interferometry of longitudinal shift, an uncertainty of required phase shift performance leads to a measurement error. Such uncertainty can be caused by external factors (vibrations, air turbulence in measuring area etc.) as well as inaccuracy of the scanning system. The method for calcu...

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Main Authors: Sysoev E., Kulikov R., Vykhristyuk I., Chugui Yu.
Format: Article
Language:English
Published: Sciendo 2015-02-01
Series:Measurement Science Review
Subjects:
Phase shifting interferometry
nanorelief measurement
measurement error
Online Access:http://www.degruyter.com/view/j/msr.2015.15.issue-1/msr-2015-0002/msr-2015-0002.xml?format=INT
id doaj-e7198cafcc194f1dab272bd4f17d8752
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spelling doaj-e7198cafcc194f1dab272bd4f17d87522020-11-25T01:56:31ZengSciendoMeasurement Science Review1335-88712015-02-0115191210.1515/msr-2015-0002msr-2015-0002Correction of Scanning Steps to Improve Accuracy in Interferometric ProfilometerSysoev E.0Kulikov R.1Vykhristyuk I.2Chugui Yu.3Technological Design Institute of Scientific Instrument Engineering, Siberian Branch of the Russian Academy of Sciences (TDI SIE SB RAS), 41, Russkaya str., Novosibirsk, 630058, RussiaTechnological Design Institute of Scientific Instrument Engineering, Siberian Branch of the Russian Academy of Sciences (TDI SIE SB RAS), 41, Russkaya str., Novosibirsk, 630058, RussiaTechnological Design Institute of Scientific Instrument Engineering, Siberian Branch of the Russian Academy of Sciences (TDI SIE SB RAS), 41, Russkaya str., Novosibirsk, 630058, RussiaTechnological Design Institute of Scientific Instrument Engineering, Siberian Branch of the Russian Academy of Sciences (TDI SIE SB RAS), 41, Russkaya str., Novosibirsk, 630058, RussiaIn scanning interferometry of longitudinal shift, an uncertainty of required phase shift performance leads to a measurement error. Such uncertainty can be caused by external factors (vibrations, air turbulence in measuring area etc.) as well as inaccuracy of the scanning system. The method for calculating the phase shift between interferograms, which allows reducing the measurement error, is proposed. The results of numerical and full scale experiments are presented.http://www.degruyter.com/view/j/msr.2015.15.issue-1/msr-2015-0002/msr-2015-0002.xml?format=INTPhase shifting interferometrynanorelief measurementmeasurement error
collection DOAJ
language English
format Article
sources DOAJ
author Sysoev E.
Kulikov R.
Vykhristyuk I.
Chugui Yu.
spellingShingle Sysoev E.
Kulikov R.
Vykhristyuk I.
Chugui Yu.
Correction of Scanning Steps to Improve Accuracy in Interferometric Profilometer
Measurement Science Review
Phase shifting interferometry
nanorelief measurement
measurement error
author_facet Sysoev E.
Kulikov R.
Vykhristyuk I.
Chugui Yu.
author_sort Sysoev E.
title Correction of Scanning Steps to Improve Accuracy in Interferometric Profilometer
title_short Correction of Scanning Steps to Improve Accuracy in Interferometric Profilometer
title_full Correction of Scanning Steps to Improve Accuracy in Interferometric Profilometer
title_fullStr Correction of Scanning Steps to Improve Accuracy in Interferometric Profilometer
title_full_unstemmed Correction of Scanning Steps to Improve Accuracy in Interferometric Profilometer
title_sort correction of scanning steps to improve accuracy in interferometric profilometer
publisher Sciendo
series Measurement Science Review
issn 1335-8871
publishDate 2015-02-01
description In scanning interferometry of longitudinal shift, an uncertainty of required phase shift performance leads to a measurement error. Such uncertainty can be caused by external factors (vibrations, air turbulence in measuring area etc.) as well as inaccuracy of the scanning system. The method for calculating the phase shift between interferograms, which allows reducing the measurement error, is proposed. The results of numerical and full scale experiments are presented.
topic Phase shifting interferometry
nanorelief measurement
measurement error
url http://www.degruyter.com/view/j/msr.2015.15.issue-1/msr-2015-0002/msr-2015-0002.xml?format=INT
work_keys_str_mv AT sysoeve correctionofscanningstepstoimproveaccuracyininterferometricprofilometer
AT kulikovr correctionofscanningstepstoimproveaccuracyininterferometricprofilometer
AT vykhristyuki correctionofscanningstepstoimproveaccuracyininterferometricprofilometer
AT chuguiyu correctionofscanningstepstoimproveaccuracyininterferometricprofilometer
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