A Semi-Analytical Model for Calculating Touch-Point Pressure and Pull-in Voltage for Clamped Diaphragms with Residual Stress
A closed form model for evaluating touch point pressure and pull-in voltage of clamped square diaphragm with residual stress is proposed. Square diaphragms are used in numerous applications. The design parameters for all these structures are pull-in voltage and/or touchpoint pressure. The materials...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
IFSA Publishing, S.L.
2007-10-01
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| Series: | Sensors & Transducers |
| Subjects: | |
| Online Access: | http://www.sensorsportal.com/HTML/DIGEST/october_07/P_SI_19.pdf |