Enhancing the closed-loop stability of a high-Q polysilicon micro-hemispherical resonating gyroscope
This paper presents an enhanced stability strategy for the sense mode of a force-rebalanced closed-loop polysilicon micro-hemispherical resonating gyroscope (μHRG) with a high-Q quality-factor value (15.2k). The sense mode closed-loop control including the Coriolis force and quadrature error force r...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2019-02-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/1.5045360 |