An Experimental Study on the Fabrication of Glass-based Acceleration Sensor Body Using Micro Powder Blasting Method
This study investigated the feasibility of the micro powder blasting technique for the micro fabrication of sensor structures using the Pyrex glass to replace the existing silicon-based acceleration sensor fabrication processes. As the preliminary experiments, the effects of the blasting pressure, t...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2007-05-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | http://www.mdpi.com/1424-8220/7/5/697/ |