V<sub>2</sub>O<sub>5</sub> Thin Films as Nitrogen Dioxide Sensors

V<sub>2</sub>O<sub>5</sub> Thin Films as Nitrogen Dioxide Sensors

V<sub>2</sub>O<sub>5</sub> thin films were deposited onto insulating support (either fused silica or alumina) by means of rf reactive sputtering from a metallic vanadium target. Argon-oxygen gas mixtures of different compositions controlled by the flow rates were used for spu...

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Bibliographic Details
Main Authors: Krystyna Schneider, Wojciech Maziarz
Format: Article
Language:English
Published: MDPI AG 2018-12-01
Series:Proceedings
Subjects:
vanadium pentoxide
thin film
rf reactive sputtering
electrical properties
nitrogen dioxide
gas sensor
Online Access:https://www.mdpi.com/2504-3900/2/13/759

Internet

https://www.mdpi.com/2504-3900/2/13/759

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