Prediction Surface Morphology of Nanostructure Fabricated by Nano-Oxidation Technology

Atomic force microscopy (AFM) was used for visualization of a nano-oxidation technique performed on diamond-like carbon (DLC) thin film. Experiments of the nano-oxidation technique of the DLC thin film include those on nano-oxidation points and nano-oxidation lines. The feature sizes of the DLC thin...

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Bibliographic Details
Main Authors: Jen-Ching Huang, Ho Chang, Chin-Guo Kuo, Jeen-Fong Li, Yong-Chin You
Format: Article
Language:English
Published: MDPI AG 2015-12-01
Series:Materials
Subjects:
Online Access:http://www.mdpi.com/1996-1944/8/12/5468