Design and Characterization of Nano-Displacement Sensor with High-Frequency Oscillators
The circuitry of a capacitive nanometer displacement sensor using the ring oscillator has been analyzed and characterized. We focus on the sensitivity of the sensor to detect the nanometer displacement or strain. The displaced target object must be conductive and the medium around the target object...
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| Format: | Article |
| Language: | English |
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Hindawi Limited
2011-01-01
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| Series: | Journal of Sensors |
| Online Access: | http://dx.doi.org/10.1155/2011/360173 |