Review of MEMS Based Fourier Transform Spectrometers
Fourier transform spectrometers (FTS), mostly working in infrared (IR) or near infrared (NIR) range, provide a variety of chemical or material analysis with high sensitivity and accuracy and are widely used in public safety, environmental monitoring and national border security, such as explosive de...
| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2020-02-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/11/2/214 |