Review of MEMS Based Fourier Transform Spectrometers

Review of MEMS Based Fourier Transform Spectrometers

Fourier transform spectrometers (FTS), mostly working in infrared (IR) or near infrared (NIR) range, provide a variety of chemical or material analysis with high sensitivity and accuracy and are widely used in public safety, environmental monitoring and national border security, such as explosive de...

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Bibliographic Details
Main Authors:	Junyu Chai, Kun Zhang, Yuan Xue, Wenguang Liu, Tian Chen, Yao Lu, Guomin Zhao
Format:	Article
Language:	English
Published:	MDPI AG 2020-02-01
Series:	Micromachines
Subjects:	fourier transform spectrometers fourier transform infrared spectrometers (ftir) micro-electromechanical system micromirror microactuator
Online Access:	https://www.mdpi.com/2072-666X/11/2/214

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