Effect of Thickness on Properties of Copper Thin Films Growth on Glass by DC Planar Magnetron Sputtering
Copper thin films with nano-scale structure have numerous applications in modern technology. In this work, Cu thin films with different thicknesses from 50–220 nm have been deposited on glass substrate by DC magnetron sputtering technique at room temperature in pure Ar gas. The sputtering time...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Nanoscience and Nanotechnology Research Center, University of Kashan
2012-03-01
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| Series: | Journal of Nanostructures |
| Subjects: | |
| Online Access: | http://jns.kashanu.ac.ir/article_5354_ae620e5d439a85703fd96d1a5b9fa429.pdf |