An Improved Dimensional Measurement Method of Staircase Patterns With Higher Precision in 3D NAND
3D NAND is a great architectural innovation in the field of flash memory. The staircase for control gate is a unique and important process in the manufacturing of 3D NAND. The staircase is employed to form the electrical connection between the control gate and contact. The current method used to mea...
| Main Authors: | , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2020-01-01
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| Series: | IEEE Access |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/9149612/ |