Low-Cost Microbolometer Type Infrared Detectors

Low-Cost Microbolometer Type Infrared Detectors

The complementary metal oxide semiconductor (CMOS) microbolometer technology provides a low-cost approach for the long-wave infrared (LWIR) imaging applications. The fabrication of the CMOS-compatible microbolometer infrared focal plane arrays (IRFPAs) is based on the combination of the standard CMO...

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Bibliographic Details
Main Authors: Le Yu, Yaozu Guo, Haoyu Zhu, Mingcheng Luo, Ping Han, Xiaoli Ji
Format: Article
Language:English
Published: MDPI AG 2020-08-01
Series:Micromachines
Subjects:
microbolometer
complementary metal oxide semiconductor (CMOS)-compatible
uncooled infrared detectors
thermal detectors
infrared focal plane array (IRFPA)
read-out integrated circuit (ROIC)
Online Access:https://www.mdpi.com/2072-666X/11/9/800

Internet

https://www.mdpi.com/2072-666X/11/9/800

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