Effect of Substrate Holder Design on Stress and Uniformity of Large-Area Polycrystalline Diamond Films Grown by Microwave Plasma-Assisted CVD

Effect of Substrate Holder Design on Stress and Uniformity of Large-Area Polycrystalline Diamond Films Grown by Microwave Plasma-Assisted CVD

In this work, the substrate holders of three principal geometries (flat, pocket, and pedestal) were designed based on E-field simulations. They were fabricated and then tested in microwave plasma-assisted chemical vapor deposition process with the purpose of the homogeneous growth of 100-μm-thick, l...

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Bibliographic Details
Main Authors: Vadim Sedov, Artem Martyanov, Alexandr Altakhov, Alexey Popovich, Mikhail Shevchenko, Sergey Savin, Evgeny Zavedeev, Maxim Zanaveskin, Andrey Sinogeykin, Victor Ralchenko, Vitaly Konov
Format: Article
Language:English
Published: MDPI AG 2020-09-01
Series:Coatings
Subjects:
polycrystalline diamond
CVD synthesis
microwave plasma
thermal conductivity
heat sinks
Online Access:https://www.mdpi.com/2079-6412/10/10/939

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https://www.mdpi.com/2079-6412/10/10/939

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