Effect of Substrate Holder Design on Stress and Uniformity of Large-Area Polycrystalline Diamond Films Grown by Microwave Plasma-Assisted CVD
In this work, the substrate holders of three principal geometries (flat, pocket, and pedestal) were designed based on E-field simulations. They were fabricated and then tested in microwave plasma-assisted chemical vapor deposition process with the purpose of the homogeneous growth of 100-μm-thick, l...
Main Authors: | Vadim Sedov, Artem Martyanov, Alexandr Altakhov, Alexey Popovich, Mikhail Shevchenko, Sergey Savin, Evgeny Zavedeev, Maxim Zanaveskin, Andrey Sinogeykin, Victor Ralchenko, Vitaly Konov |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2020-09-01
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Series: | Coatings |
Subjects: | |
Online Access: | https://www.mdpi.com/2079-6412/10/10/939 |
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