Gas sensing properties of nanocrystalline silicon carbide films

Gas sensing properties of nanocrystalline silicon carbide films

Abstract The influence of the air atmosphere on the electrical conductivity of nanocrystalline thin SiC films obtained by method of direct ion deposition on sapphire was studied. Measurements were performed on two series of nc-SiC films with different structure: one series contained mainly 3C-SiC po...

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Bibliographic Details
Main Authors: Alexander Semenov, Anatolii Kozlovskyi, Stanislav Skorik, Denis Lubov
Format: Article
Language:English
Published: SpringerOpen 2019-05-01
Series:Micro and Nano Systems Letters
Subjects:
Silicon carbide based gas sensors
Nanocrystalline silicon carbide film
Air effect on electrical resistance
Structure effect on air sensitivity
Online Access:http://link.springer.com/article/10.1186/s40486-019-0084-7

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http://link.springer.com/article/10.1186/s40486-019-0084-7

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