Deposition of silicon nitride films using chemical vapor deposition for photovoltaic applications
Silicon nitride is a versatile material since many decades due to its compatibility with conventional fabrication technology. Other than its potential applications in microelectronics, this material has been regarded as an antireflection coating in solar cells. In this paper, we present the fabricat...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2016-01-01
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| Series: | Results in Physics |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2211379716304120 |