Directivity Analysis of Piezoelectric Micromachined Ultrasonic Transducer Array
A piezoelectric micromachined ultrasonic transducer (pMUT) is proposed. The (Pt/Ti)/Polyimide/PZT/Si3N4/SiO2/Si/SiO2/Si3N4 multimorph structure is designed and fabricated with micromachined process, resonance frequency of which is supposed to locate near 53.6 kHz. To improve the directivity pattern...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IFSA Publishing, S.L.
2009-12-01
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| Series: | Sensors & Transducers |
| Subjects: | |
| Online Access: | http://www.sensorsportal.com/HTML/DIGEST/december_09/P_539.pdf |